|
規格
(mm) |
測量面對績面垂直度
|
測量面平面度或直線度
|
基面平面度或直線度
|
|||
|
精 度 等 級(μm)
|
||||||
|
00
|
0
|
00
|
0
|
00
|
0
|
|
| 100 x 63 |
2
|
4
|
1
|
1
|
1
|
1
|
| 160 x 100 |
2
|
4
|
1
|
2
|
1
|
1
|
| 250 x 160 |
2.5
|
5
|
1
|
2
|
1
|
2
|
| 400 x 250 |
3.5
|
7
|
1
|
2.5
|
1
|
2
|
| 630 x 400 |
4.5
|
9
|
1.5
|
3
|
1
|
2.5
|
| 1000 x 630 |
6
|
12
|
2.5
|
5
|
1.5
|
3
|